Dry ice cleaning for semiconductor cleaning
Time:2025-06-03 Category:【Industry dynamics】Read:19
With the continuous advancement of semiconductor manufacturing processes, the requirements for cleanliness in the manufacturing environment are also increasing. Traditional cleaning methods, such as liquid chemical cleaning, often pose a risk of secondary pollution, affecting product performance and reliability. Dry ice cleaning technology, with its environmentally friendly, efficient, and residue free characteristics, is becoming the preferred cleaning process in the semiconductor industry. This article will explore the application of dry ice cleaning in the semiconductor industry and the benefits it brings.
The basic principle of dry ice cleaning
Dry ice cleaning uses solid carbon dioxide (i.e. dry ice) particles, which are sprayed onto the target surface at high speed through a specially designed spraying device. At the moment of impact on the surface, dry ice particles absorb heat and rapidly sublime, transforming from a solid state to a gas state. During this process, the volume increases dramatically, producing a micro explosion effect that strips away surface dirt and carries it away from the target surface.
The advantages of dry ice cleaning in the semiconductor industry
Residual free cleaning: Dry ice does not leave any residual substances during the sublimation process, which is particularly important for semiconductor manufacturing because any residue may cause chip defects and affect the performance of electronic products.
Low temperature cleaning effect: The low-temperature characteristics of dry ice are particularly beneficial for certain heat sensitive semiconductor components, as it can effectively clean the components without damaging them.
Non contact cleaning: Dry ice cleaning is a non-contact cleaning method that avoids potential damage to precision components caused by physical friction and protects the integrity of semiconductor devices.
Reduce downtime: Dry ice cleaning can be carried out online without dismantling equipment, greatly reducing downtime on the production line and improving production efficiency.
Environmental safety: Carbon dioxide is a common industrial byproduct, and using dry ice for cleaning eliminates concerns about the disposal of harmful chemicals, reducing the impact on the environment; Meanwhile, due to the absence of traditional cleaning agents, the safety of workers has been improved.
The challenge of implementing dry ice cleaning
The challenges to be aware of when implementing dry ice cleaning in the semiconductor industry include:
Storage and supply chain requirements for dry ice to ensure the continuity of cleaning operations.
During the cleaning process, a large amount of carbon dioxide gas may be generated, requiring good ventilation facilities.
Professional operational training is required to ensure the safety of equipment and personnel.
Conclusion:
Dry ice cleaning, as a revolutionary cleaning technology, has demonstrated its unique value in the semiconductor industry. It not only improves cleaning efficiency and reduces production costs, but also helps manufacture higher quality semiconductor products. With the continuous development and improvement of technology, dry ice cleaning is expected to be more widely used in the semiconductor manufacturing industry.